MKS VISION-2000-E 多压力和CVD/ALD工艺用残余气体分析仪 (1-200 amu)
制造商: MKS Model: VISION-2000-E - 报价要求
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Mass Range: 1 - 200 amu
Ion Source: High conductance closed ion source
Filaments: Twin Tungsten filaments
Mass Filter: Double filter (1 in. "RF only" pre-filter with 4 in. main filter)
Detector: Dual (Faraday and secondary electron multiplier)
Mass Stability: Better than ±0.1 amu over 8 hours
Resolution: Better than 10% valley for peaks of equal height across mass range
Bake Out Temperature: 180°C with Bakeout Jacket
Operating Temperature: 90°C (controlled to ±1°C)
Weight: 33 lbs. (15 kg) to bolt on Process System
Mechanical Support: Optional stands and brackets are available
Pneumatics: 60-80 psig CDA
Electronics Weight on Flange: 1.7 kg
Power Requirements: 88 - 264 VAC, 47/63 Hz, 600 W
Maximum Operating Conditions: Electronics: 10 - 40°C, 80% RH (non condensing)
Communication: Ethernet CAT-5e
Shipping Weight: 44 lbs (20 kg) may vary depending upon backing pump and instrument rack requirements
Type: Residual Gas Analyzer
Measurement Technique: Mass Spectrometry
Compliance: Compliant to RoHS Directive 2002/95/EC (control unit)
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