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MKS 946 真空系统控制器 (10.000-10^-11Torr; RS232&RS485; US)

  • 制造商:MKS
    Model: 946
    P/N: 946-US-NANANA-NA
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Pressure Range: 10,000 Torr to 10-11 Torr (Dependent upon sensor type)

Display: 320x240 color QVGA TFT LCD with back lighting

Units: Pressure: Torr, mbar, Pascal

          Flow: sccm and slm

Electrical Plug: United States

Power Requirements: 100 - 240 VAC 50/60 Hz 150 W maximum

Relays: 12

Set Point Contact Rating: 2 amps @ 30 VAC

Operating Temperature: 5-40°C (41-104°F)

Storage Temperature: 10-55°C (50-131°F)

Mounting: 1/2 rack, 2U High, 13 inches deep

Weight: 8 lbs. (3.6 kg)

Compliance: CE

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