MKS IE250A Elastomer Sealed, Digital Mass Flow Controller (100 - 250 slm; IP66)

Full Scale Flow Range: 100-250 slm (N2 equivalent)

Fitting Type: 12 mm Swagelok; 0.375 in. Swagelok; 0.5 in. tube compression; 0.5 in. compression long; 0.5 in. NPT female; 8 VCR male; 8 VCO male; 8 VCR male long; 8 VCO male long; W-Seal

Connector: Profibus (1179B Compatible); Profibus (1480 Compatible); PROFINET; 15 pin D (Analog 0-5 VDC I/O); 15 pin D (4-20 mA I/O)

Maximum Inlet Pressure: 150 psig

Normal Operating Pressure Differential: 30-55 psid

Burst Pressure: 1500 psig

Control Range: 2-100% of Full Scale

Typical Accuracy: ±1% of set point for >20% to 100% Full Scale

                            ±0.25% of Full Scale for 5% to 20% Full Scale

Repeatability: ±0.5% of Reading

Resolution: 0.1% of Reading

Zero Temperature Coefficient: <0.05% of Full Scale/°C

Span Temperature Coefficient: <0.08% of Rdg./°C

Inlet Pressure Coefficient: <0.03% of Reading

Typical Settling Time: 1 to 2 seconds typical above 10% Full Scale @ 50 psi

Warm-up Time: 1 hour

Operating Temperature: 10-50°C

Storage Humidity: 0 to 95% Relative Humidity, non-condensing

Storage Temperature: -20° to 65°C

Enclosure Rating: IP66

Power Requirements: +15 to +24 VDC @ (<4 watts)

Flow Input Output Signal: Voltage: 0 to 5 VDC. Current: 4 to 20 mA

Weight: 4.5 lbs. (2.05 kg)

Compliance: CE

For specific range please check the attachment below!