MKS 972B 双磁冷阴极真空传感器 (Display; NW25 ISO-KF; RS232; 3 Relays)
制造商: MKS Model: 972B P/N: 972B-21034 - 报价要求
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Absolute Measurement Range: 1.0 x 10-8 to 760 Torr
Digital Communication: RS232
Type: Vacuum Transducer
Sensor: Cold Cathode and MicroPirani™ (MEMS Thermal Conductivity)
Display: Touch-screen
Seal Material: Viton
Electrical Connector: 15-pin, High Density, D-sub male
Interface: RS232/analog
Relays: 3
Fitting Type: NW25 ISO-KF
Installation Orientation: Any
Set Point Range: 1 x 10-8 Torr to Atmosphere Absolute
Calibration Gas: Nitrogen
Operating Temperature: 0 - 40°C (32 - 104°F)
Maximum Bakeout Temperature: 85°C (185°F)
Analog Output: 0.5 VDC per Decade
Relay Contact Rating: 1 A @ 30VAC/DC, resistive
Power Requirements: 9 - 30 VDC, 2 Watts
Overpressure Limit: 1500 Torr
Internal Volume: 21 cm3
Exposed Materials: 304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton, epoxy resin, ceramic
Electronic Casing and Flange: 304 stainless steel
Compliance: CE
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