MKS 971B UniMag™ 冷阴极真空压力传感器 (Touch-screen; 3 relays; RS232)
制造商: MKS Model: 971B P/N: 971B-21034 - 报价要求
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Absolute Measurement Range: 1.0 x 10-8 to 0.005 Torr
Digital Communication: RS232
Type: Vacuum Transducer
Sensor: Cold Cathode
Display: Touch-screen
Seal Material: Viton
Electrical Connector: 15-pin, High Density, D-sub male
Interface: RS232/analog
Relays: 3
Fitting Type: NW25 ISO-KF
Installation Orientation: Any
Set Point Range: 1 x 10-8 Torr to 5 x 10-3 Torr Absolute
Calibration Gas: Nitrogen
Operating Temperature: 0 - 40°C (32 - 104°F)
Maximum Bakeout Temperature: 85°C (185°F)
Analog Output: 0.5 VDC per Decade
Relay Contact Rating: 1 A @ 30VAC/DC, resistive
Power Requirements: 9 - 30 VDC, 2 Watts
Accuracy: 5 x 10-8 Torr to 10-3 ±30% of Reading (Typical)
Repeatability: 5 x 10-8 Torr to 10-3 ±30% of Reading (Typical)
Overpressure Limit: 1500 Torr
Internal Volume: 21 cm3
Exposed Materials: 304 and 403 stainless steel, Viton, Cu-Ni and Ag-Cu alloy, ceramic, titanium
Electronic Casing and Flange: 304 stainless steel
Compliance: CE
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