MKS 390 Micro-Ion® ATM 模块化真空压力传感器 (2.75 in. CF; EtherCAT)

Absolute Measurement Range: 1.0 x 10-9 to 760 Torr

Differential Measurement Range: -750 to +250 Torr

Digital Communication: EtherCAT

Type: Vacuum Gauge Module

Display: No

Relays: 2

Fitting Type: 2.75 in. CF

Operating Temperature: 10 - 40°C (50° to 104°F), non-condensing

Maximum Bakeout Temperature: 105°C (221°F) maximum, with electronics removed

Storage Temperature: -40 - 70°C (-40 - 158°F)

Power Requirements: 24 VDC +10% to -15%, 1 Amp, 22 Watts nominal

Internal Volume: 10.8 cm3 (0.65 in3)

Exposed Materials: 304 stainless steel, tantalum, tungsten, yttria-coated iridium, alumina, CuAg eutectic, Kovar, gold or nickel plated Kovar, borosilicate glass

Electronic Casing and Flange: Aluminum Extrusion with Powder-coat

Compliance: CE

Filament: Yttria-coated Iridium

Response Time: <25 mseconds

Connectors: 15-pin subminiature-D male, two RJ45

Units: Torr

X-ray Limit: <3 x 10-10 Torr, <4 x 10-10 mbar, <4 x 10-8 Pascal

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