MKS 355 热阴极真空压力传感器 (NW25 ISO-KF; RS485)

Absolute Measurement Range: 1.0 x 10-9 to 0.05 Torr

Digital Communication: RS485

Type: Vacuum Gauge Module

Display: No

Relays: 1

Fitting Type: NW25 ISO-KF

Operating Temperature: 0 - 40°C ambient, non-condensing

Maximum Bakeout Temperature: 200°C (with electronics removed)

Storage Temperature: -40 - 70°C

Relay Contact Rating: 1 A at 30 VDC resistive load, 0.5 A at 125 VAC non-inductive

Power Requirements: 24 VDC ±15%, 12 Watts maximum

Internal Volume: 10.8 cm3 (0.66 in.3) to the port screen

Exposed Materials: 304 stainless steel, alumina, tantalum, tungsten, CuAg eutectic, Kovar

Electronic Casing and Flange: Aluminum extrusion

Compliance: CE, SEMI S2

Filament: Yttria-coated Iridium

Connectors: 9-pin type D male

Units: Torr

X-ray Limit: <3 x 10-10 Torr, <4 x 10-10 mbar, <4 x10-10 Pa

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